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You can provide feedback by sending email to Creative Support at. A recent version of Microsoft Windows operating system. Operating system versions: 1, 2, 3, 4.1. Field of the Invention
The present invention relates to a method of manufacturing a semiconductor device having a semiconductor circuit or the like, and more particularly to a method of manufacturing a semiconductor device which comprises a circuit composed of a thin film made of a semiconductor, an insulating film or the like formed on an insulating substrate such as a glass substrate.
2. Description of the Related Art
Many semiconductor devices having a semiconductor circuit or the like are formed on a glass substrate instead of a silicon semiconductor substrate. The reason for this is that the substrate formed by polishing and slicing a silicon ingot is larger than a substrate formed by polishing and slicing a glass ingot, and a larger substrate can be easily prepared as a semiconductor substrate.
When the circuit on a glass substrate is operated, the substrate is set in a vacuum atmosphere at a high temperature for reducing the thermal resistance of the substrate to the outside. Since a metal such as aluminum is used as the material for the circuit on the glass substrate, the electrical resistance of the circuit is large. Therefore, when the circuit is operated, large power is consumed. In order to solve this problem, the application of a semiconductor is being extensively considered.
However, a silicon semiconductor substrate is stable compared with a glass substrate. Therefore, when the substrate on which a semiconductor circuit or the like is formed is mounted on a circuit board, the substrate has a high thermal resistance, and the electrical resistance of the circuit is increased. Therefore, the consumption power is increased, and the substrate has the problem of high cost when it is driven for a long period. As a method of solving this problem, the development of an insulator which has a low electric resistance and which is stable at a high temperature is being advanced.
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